Silicon Microstructures SM933x Differential Pressure Sensors are high precision sensors for ultra low-pressure measurements. The SM933x sensors offer state-of-the-art Micro-ElectroMechanical Systems (MEMS) pressure transducer technology and CMOS mixed signal processing technology. These differential pressure sensors combine pressure sensor with signal-conditioning Application-Specific Integrated Circuit (ASIC) in a single package.
Features
125Pa and 250Pa differential pressure ranges<1%FS accuracy after autozero16-bit I
2C digital interfacePressure calibrated and temperature compensated outputREACH, RoHS, and PFOS/PFOA compliant
Specifications
3V to 5.5V supply voltage (V
DD)-0.3V to (V
DD+0.3)V digital IO voltage7kPa proof pressure20kPa burst pressure-2kV to 2kV ESD Human Body Model (HBM) protection at all pins-40°C to 125°C storage temperature range-20°C to 85°C compensated temperature range
Applications
Medical:Sleep apneaContinuous Positive Airway Pressure (CPAP)VentilatorsGas flow instrumentationAirflow monitorsLife sciences
